Content
6 Axis Manipulator EM100 Series
SIX AXIS MANIPULATOR EM100 SERIES are most suitable for fine positioning with the element of liquid crystal projector and CCD camera, and most of experimental instrument. Miniaturization, light-weighting, high stiffness, and cost reduction realized at the same time.
Dimensions, the appearance are different by specifications. It is necessary to have a consultation separately for details.
SPECIFICATION
Axis | Ideal Resolution | Motion Range | Max Speed | Micro-step Function |
X | 0.1µm | ±5mm | 1mm/sec | 1/20 |
Y | 0.1µm | ±5mm | 1mm/sec | 1/20 |
Z | 0.1µm | ±5mm | 10mm/sec | 1/20 |
øx
| 0.00765deg | ±3deg | 76.5deg/sec | 1/4 |
øy | 0.0006deg | ±3deg | 6deg/sec | 1/4 |
Øz | 0.0018deg | ±3deg | 18deg/sec | 1/4 |