Content
Understanding X, XY Linear Stage Specifications
Specifications | Description | |
Model Number | YA07A-R1 | 1. Kohzu's significant alpha-numeric model numbers offer quick product insight. |
Mirror Model Number | YA07A-R1-RRR | 2. Mirror symmetry of standard stage. |
Table Size | 70mm | 3. Table size refers to the stage's upper-most mounting surface. |
Guide Mechanism | Cross-Roller Bearing | 4. Type of guide mechanism used on this stage. |
Motion Range | ±±10mm | 5. Stage travel range in the positive and negative directions from it's centered or neutral position. |
Lead Mechanism | Ground Screw, Pitch 0.5mm | 6. Feeding Mechanism and lead screw pitch. |
Ideal Resolution | 0.25μm / step (Half Step) | 7. Ideal Resolution of standard stage (half step). |
Maximum Speed | 2.5mm/sec. | 8. Maximum Speed of standard stage (half step, 10kpps). |
Accumulated Lead Error | ≦ 10μm / 20mm | 9. See "Kohzu Stage Inspection Standards" section. |
Repeatability | ±0.5μm | 10. See "Kohzu Stage Inspection Standards" section. |
Lost Motion | ≦ 1μm | 11. See "Kohzu Stage Inspection Standards" section. |
Straightness | ≦ 1μm / 20mm | 12. Straightness is measured relative to mounting surface. |
Backlash | ≦ 1μm | 13. See "Kohzu Stage Inspection Standards" section. |
Moment Load Stiffness | 3 arcsec / kgf-cm | 14. See "Kohzu Stage Inspection Standards" section. |
Load Capacity (Horizontal) | 9kg | 15. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate. |
Material | Aluminum Alloy | 16. Material specification is for stage's main body components only. |
Finish | Clear-Matte Anodizing | 17. Surface finish type and color. |
Weight | 1.7kg | 18. Stage weight includes all components depicted in product photograph. |
Perpendicularity | ≦ 5μm / 20mm | 19. Perpendicularity (or orthogonality) between motion axes in a dual-axis XY stage assembly. |
Standard Motor | Five (5) phase stepper motor PX533MH-B | 20. Actuator type. |
Standard Connector | RP13A-12RA-20PC | 21. Connector type. |
Guide Mechanism Type
Cross-Roller Bearing
In cross-roller bearing guides,,, quench hardened and precision ground bearing surfaces move upon loose hardened steel cylinders (rollers) with rotation axes oriented in alternating 90 degree angles (Ref. Fig.1). Having rollers arranged in an alternating cross pattern allows preloading and operation at any angle. The roller bearings are held apart from one another by a bearing cage, which prevents adjacent rollers from touching. Since cross roller bearings have little difference between static and dynamic friction they minimize startto- stop slip-motion typical of other bearing types. The line contact of roller bearings along with precise roller-to-race gap management provide larger load-bearing surfaces, higher preloads and meet very tight runout and stiffness specifications.
Linear Guide
The linear guide system consists of a LM rail and steel ball (see Fig. 2). The ball rolls in the groove of the rail, is picked up by an end cap at the bearing end, passes through the circulating hole in the bearing main body, and returns to the other end. Since the sliding surface is fabricated by quenching and abrasive finishing, the rail surface is precise, flat and hard. The ball is caught in the pseudo-cylinder shaped groove formed by the sliding surface and held at two or four points. Since the pseudo-cylinder surface and the bearing are in contact with each other at two points, slipping does not easily occur.
Feeding Mechanism
Ground Screw
The ground screw is ground at high precision and is held in place by a female screw (see Fig. 3). Since the ground screw and female screw are in contact with each other over a wide area, they do not move even if a horizontal load is applied to the stage. Also compared with the ball screw, the feed distance per rotation can be reduced to improve the resolution.
Ball Screw
The ball screw consists of a screw axis, a nut, and steel ball between them (Fig. 4). When the screw is rotated, the ball rolls and moves between the ball screw axis and the nut, and then returns to its original position. Since a ball is rolled, the friction is low, a high transmission effect is obtained, the difference between static friction and dynamic friction is small, and stick-slip does not easily occur.
Ideal Resolution
Ideal Resolution of standard stage is calculated based on the following formula.
ΔX = p＊Δθ/360m | ΔX： Ideal Resolution※ |
Δθ： Basic step angle of motor | |
p ： Lead screw pitch | |
m ： Micro step division number |
※ Kohzu uses two motors with basic step angles of 0.36° / pulse and 0.72° / pulse, and a feed screw pitch of 0.5 to 2mm/rev. The minimum resolution described in this catalog is calculated with two (2) divisions of the standard motor step (half-step, where the value of m is 2).
Model number | Screw pitch (mm / p) | Basic step angle of motor (° / p) | Micro-step | Resolution (μm / p) |
XA05A-R1, YA05A-R1, XA07A (F) -R1, YA07A (F) -R1 XA10A (F) -R1, YA10A (F) -R1 | 0.5 | 0.36 | 2 | 0.25 |
XA05A-R2 , YA05A-R2 , XA07A-R2 , YA07A-R2 XA10A (F) -R2 , YA10A (F) -R2 , XA05A-L2 , XA07A-L2 | 1 | 0.36 | 2 | 0.5 |
XA04A-R2 , YA04A-R2 , XA07A-R2H , YA07A-R2H XA10A-R2H , YA10A-R2H , XA10A-L1 , YA10A-L1 XA16A-R1 , YA16A-R1 , XA16A-L1 | 1 | 0.72 | 2 | 1 |
XA10A-L2 , YA10A-L2 , XA16A-R2 , YA16A-R2 , XA16A-L2 | 2 | 0.72 | 2 | 2 |
Maximum Speed
Maximum speed depends on individual motor torque characteristics. However, we calculate maximum speed at 10kpps with motor in half-step mode.
Standard & Reverse Stage Assembly Configurations
Upon request, we can supply reverse arrangement specifications in which the connector and the sensor are mounted in reverse horizontally. We can also provide a combination stage of a standard and reverse arrangement in the X-Y-direction.
Model Number | Lower Axis Stage | Upper Axis Stage | Assembly Configuration |
ーNNN (no mark) | Standard (Right Hand) | Standard (Right Hand) | Standard Assembly |
ーNNR | Standard (Right Hand) | Standard (Right Hand) | Reversed Assembly |
ーNRN | Standard (Right Hand) | Mirror Symmetry (Left Hand) | Standard Assembly |
ーNRR | Standard (Right Hand) | Mirror Symmetry (Left Hand) | Reversed Assembly |
ーRNN | Mirror Symmetry (Left Hand) | Standard (Right Hand) | Standard Assembly |
ーRNR | Mirror Symmetry (Left Hand) | Standard (Right Hand) | Reversed Assembly |
ーRRN | Mirror Symmetry (Left Hand) | Mirror Symmetry (Left Hand) | Standard Assembly |
ーRRR | Mirror Symmetry (Left Hand) | Mirror Symmetry (Left Hand) | Reversed Assembly |
